Optical Inspection of Microsystems - - Books - Taylor & Francis Ltd - 9780367390570 - October 17, 2019
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Optical Inspection of Microsystems 1st edition

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This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

503 pages, 375 equations; 230 Halftones, black and white; 23 Tables, black and white; 479 Illustrati

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 17, 2019
ISBN13 9780367390570
Publishers Taylor & Francis Ltd
Pages 532
Dimensions 150 × 220 × 10 mm   ·   453 g
Language English  
Series Editor Thompson, Brian J. (University of Rochester, New York, USA)

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