Capacitive Silicon Resonators: Performance Enhancement Methods - Nguyen Van Toan - Books - Taylor & Francis Ltd - 9780367217761 - June 24, 2019
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Nguyen Van Toan
Capacitive Silicon Resonators: Performance Enhancement Methods 1st edition

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Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.

162 pages, 19 Tables, black and white; 119 Illustrations, black and white

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 24, 2019
ISBN13 9780367217761
Publishers Taylor & Francis Ltd
Pages 162
Dimensions 240 × 162 × 16 mm   ·   416 g
Language English  

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