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Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications - Oxford Series in Nanomanufacturing Ivo Utke
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Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications - Oxford Series in Nanomanufacturing
Ivo Utke
This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
752 pages, 545
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | May 24, 2012 |
| ISBN13 | 9780199734214 |
| Publishers | Oxford University Press Inc |
| Pages | 840 |
| Dimensions | 193 × 259 × 47 mm · 2.48 kg |
| Language | English |
| Editor | Moshkalev, Stanislav (Head of Nanotechnology Group, Head of Nanotechnology Group, Center for Semiconductor Components - UNICAMP) |
| Editor | Russell, Phillip (Distinguished Professor, Distinguished Professor, Appalachian State University) |
| Editor | Utke, Ivo (Vice Head of the Laboratory for Mechanics of Materials and Nanostructures, Vice Head of the Laboratory for Mechanics of Materials and Nanostructures, EMPA - The Swiss Federal Laboratories for Materials Testing and Research) |
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