Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products - Taniguchi - Books - Oxford University Press - 9780198562832 - July 25, 1996
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Taniguchi
Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products

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The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.

406 pages, halftones, numerous line figures, tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released July 25, 1996
ISBN13 9780198562832
Publishers Oxford University Press
Pages 422
Dimensions 194 × 253 × 27 mm   ·   1.01 kg
Editor Taniguchi, Norio (Professor Emeritus, Professor Emeritus, Tokyo Science University)

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