Interlayer Dielectrics for Semiconductor Technologies - Shyam Muraka - Books - Elsevier Science Publishing Co Inc - 9780125112215 - December 30, 2003
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Shyam Muraka
Interlayer Dielectrics for Semiconductor Technologies

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.

464 pages, Approx. 200 illustrations; Illustrations, unspecified

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 30, 2003
ISBN13 9780125112215
Publishers Elsevier Science Publishing Co Inc
Pages 464
Dimensions 165 × 240 × 25 mm   ·   1.01 kg
Editor Eizenberg, Moshe
Editor Murarka, Shyam P
Editor Sinha, Ashok K

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