Physics of Radiofrequency Capacitive Discharge - Savinov, V. P. (Lomonosov Moscow State University, Moscow, Russia) - Books - Taylor & Francis Ltd - 9781138600805 - May 21, 2018
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Savinov, V. P. (Lomonosov Moscow State University, Moscow, Russia)
Physics of Radiofrequency Capacitive Discharge 1st edition

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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

322 pages, 7 Tables, black and white; 179 Illustrations, black and white

Media Books     Hardcover Book   (Book with hard spine and cover)
Released May 21, 2018
ISBN13 9781138600805
Publishers Taylor & Francis Ltd
Pages 342
Dimensions 241 × 165 × 26 mm   ·   676 g
Language English  

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