Physics of Radiofrequency Capacitive Discharge - Savinov, V. P. (Lomonosov Moscow State University, Moscow, Russia) - Books - Taylor & Francis Ltd - 9780367571627 - June 30, 2020
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Savinov, V. P. (Lomonosov Moscow State University, Moscow, Russia)
Physics of Radiofrequency Capacitive Discharge 1st edition

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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

322 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 30, 2020
ISBN13 9780367571627
Publishers Taylor & Francis Ltd
Pages 322
Dimensions 150 × 220 × 10 mm   ·   453 g
Language English  

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